Select model:
U803 | U804


Model U803

McMillan Model U803 UHP FLO-CONTROLLERS will precisely measure and control flow rates of virtually any fluid as low as 7 mLpm or as high as 1 Lpm. Repeatable results are achieved by using a patented microturbine flow sensor design. This design, unlike traditional paddlewheel designs, provides accurate flow measurement with no particle generation. An integrated proportional control valve is utilized to regulate flow rate. PTFE, perfluoroelastomers, and sapphire wetted parts ensure compatibility with chemicals commonly found in microelectronics manufacturing processes, including deionized water, CMP slurries, acids, solvents, and photoresist.

Each unit is individually calibrated before shipment, and a certificate of calibration accompanies all FLO-CONTROLLERS. A repeatability capability of ±0.2% full scale reassures process engineers of consistent results.

Model U803 Features & Options

ACCURACY/LINEARITY

All models have an accuracy specification of ±1.0% full scale (including linearity).

CALIBRATION

All units are calibrated at the factory using deionized water. Calibration curves may be requested for fluids with viscosities differing from water.

ELECTRICAL CONNECTIONS

All units have an integrated 7-pin connector. Several mating cable options are available.

FLOW PATH TYPE

The Model U803 FLO-CONTROLLER has a space-saving design with the inlet and output on the same side.

FLOW RANGES

Flow ranges from 7-50 mLpm up to 100-1,000 mLpm are available. Consult the factory for custom requirements.

FLUID CONNECTIONS

All units have male Flaretek compatible connections. Non-standard connection types may be available upon request.

POWER

Units operate with 24 VDC power.

SIGNAL CONFIGURATION

Units may be ordered with a 4-20 mA, 0-5 VDC, or 0-10 VDC configuration.

WETTED MATERIALS

All units have only PTFE, perfluoroelastomers, and sapphire as wetted parts.


Model U804

McMillan Model U804 UHP FLO-CONTROLLERS will precisely measure and control flow rates of virtually any fluid as low as 7 mLpm or as high as 1 Lpm. Repeatable results are achieved by using a patented microturbine flow sensor design. This design, unlike traditional paddlewheel designs, provides accurate flow measurement with no particle generation. An integrated proportional control valve is utilized to regulate flow rate. PTFE, perfluoroelastomers, and sapphire wetted parts ensure compatibility with chemicals commonly found in microelectronics manufacturing processes, including deionized water, CMP slurries, acids, solvents, and photoresist.

Each unit is individually calibrated before shipment, and a certificate of calibration accompanies all FLO-CONTROLLERS. A repeatability capability of ±0.2% full scale reassures process engineers of consistent results.

U804 Features & Options

ACCURACY/LINEARITY

All models have an accuracy specification of ±1.0% full scale (including linearity).

CALIBRATION

All units are calibrated at the factory using deionized water. Calibration curves may be requested for fluids with viscosities differing from water.

ELECTRICAL CONNECTIONS

All units have an integrated 7-pin connector. Several mating cable options are available.

FLOW PATH TYPE

The Model U804 FLO CONTROLLER is an inline unit particularly suitable for applications where an existing unit needs to be replaced.

FLOW RANGES

Flow ranges from 7-50 mLpm up to 100-1,000 mLpm are available. Consult the factory for custom requirements.

FLUID CONNECTIONS

All units have male Flaretek compatible connections. Non-standard connection types may be available upon request.

POWER

Units operate with 24 VDC power.

SIGNAL CONFIGURATION

Units may be ordered with a 4-20 mA, 0-5 VDC, or 0-10 VDC signal configuration.

WETTED MATERIALS

All units have only PTFE, perfluoroelastomers, and sapphire as wetted parts.


Specifications


Accuracy (including linearity, best fit straight line):
±1.0% Full Scale
Repeatability:
±0.2% Full Scale
Pressure Rating:
80 psig (5.4 bar) maximum working
100 psig (6.8 bar) overpressure
Temperature Rating (Fluid):
5 to 45ºC
Temperature Rating (Environment):
Operating: 5 to 45ºC
Storage: 0 to 70ºC
Valve Type:
PTFE cam-driven diaphragm
Not recommended for positive shutoff
Wetted Materials:
PTFE
Sapphire
Exterior Surfaces:
PTFE
Polypropylene
PVC
Polyester
O-Ring Material:
Perfluoroelastomer (contact factory for current compound)
Recommended Filtration:
20 microns or less
Compatible Liquids:
Low viscosity (<10 cS)
Minimum amount of entrained air
Warm-Up Time:
Model U803: None
Zero Drift:
None
Calibration Interval:
Calibration should typically be verified once every 12 months
Power Requirements:
22-25 VDC
250 mA typical (1A peak)
Electrical Connections:
7-pin connector
Nylon housing when used with CVx cables
Typical Response Time:
Typically less than 3 seconds for 97% of final value
Reliability:
100,000 hours MTBF (testing ongoing)
Approvals/Certifications:
CE Approved
89/336/EEC (EN 55011 & EN 50082-1)
73/23/EEC Low Voltage Directive
Ratings:
IP64 (NEMA 4X)
0-10 VDC Output:
0 VDC at zero flow
5 Kohm or greater output load
Not isolated
4-20 mA Output:
4 mA at zero flow
250 ohm maximum current loop
Not isolated
0-5 VDC Output:
0 VDC at zero flow
2.5 Kohm or greater output load
Not isolated
0-10 VDC Input:
0 VDC at zero flow Input load is 100 Kohms Not Isolated from ground
0-5 VDC Input:
0 VDC at zero flow  Input load is 100 Kohms Not Isolated from ground
4-20 mA Input:
4 mA at zero flow  Input load is less than 50 ohms Not Isolated from ground
Standby Mode:
Disables valve (freezes)
Automatically engaged when set point is less than 5% of full scale
Category
Description
File Size
File Name
DATA SHEETS
U803 Data Sheet
197.7 KB