The Model U802 Ultra-High-Purity (UHP) FLO-CONTROLLER will precisely measure and control flow rates of virtually any fluid as low as 15 mL/minute or as high as 10 LPM. Repeatable results are achieved by utilizing a patented microturbine flow sensor design. This controller integrates all electronics and fluid components into a single package, eliminating the need for any external modules.

The Model U802 UHP FLO-CONTROLLER integrates a proportional double-diaphragm valve to accurately control flow rate. McMillan design insures long life expectancy under normal operating conditions – millions of cycles with no valve degradation.

±1.0% full-scale accuracy (including linearity & hysteresis) provides the critical control required for modern microelectronic applications. Unparalleled repeatability reassures process engineers that results will be consistent.

An optional temperature rating of 0-90°C allows use in most UHP applications.

Model U802 Features & Options

AACCURACY/LINEARITY

All models have an accuracy specification of ±1.0% full scale (including linearity).

CALIBRATION

All units are calibrated at the factory using deionized water. Calibration curves may be requested for fluids with viscosities differing from water.

DISPLAYS

An external control module is available that displays current settings, programs special features and options, and allows for calibration adjustments. Please request further information from the factory.

ELECTRICAL CONNECTIONS

All units have an integrated 7-pin connector. Several mating cable options are available. An additional 12-pin connector is fitted for custom configurations and factory programming.

FLOW RANGES

Flow ranges from 15-100 mL/minute up to 1,000-10,000 mL/minute are available. Consult factory for custom requirements.

FLUID CONNECTIONS

All units have male Flaretek-compatible connections. Non-standard connection types may be available upon request.

POWER

Units operate with 24 VDC power.

SIGNAL CONFIGURATION

Units may be ordered with a 4-20 mA, 0-5 VDC, or 0-10 VDC configuration.

WETTED MATERIALS

All units have only PTFE, perfluoroelastomers, and sapphire as wetted parts.


 

Pressure Drop

Fitting Chart

Fitting Chart

Typical Response Time

Typical Response Time

Specifications


Accuracy (including linearity, best fit straight line):
±1.0% Full Scale
Repeatability:
±0.20% Full Scale
Pressure Rating:
80 psig (5.4 bar) maximum working
100 psig (6.8 bar) overpressure
Temperature Rating (Fluid):
Standard: 0 to 55ºC
HT Suffix: 0 to 90°C
Temperature Rating (Environment):
Operating: 0 to 50ºC
Storage: 0 to 70ºC
Valve Type:
PTFE cam-driven diaphragm
Not recommended for positive shutoff
Wetted Materials:
PTFE
Sapphire
Exterior Surfaces:
PTFE
Polypropylene
PVC
Epoxy
Viton
Polyester
O-Ring Material:
Perfluoroelastomer (contact factory for current compound)
Recommended Filtration:
20 microns or less
Compatible Liquids:
Low viscosity (<10 cS)
Minimum amount of entrained air
Warm-Up Time:
None
Zero Drift:
PTFE Sapphire
Calibration Interval:
Calibration should typically be verified once every 12 months
Power Requirements:
22-25 VDC
250 mA typical (1 A peak)
Electrical Connections:
7-pin connector
PTFE housing when used with CFx cables
Nylon housing when used with CPx cables
Typical Response Time:
Typically <3 seconds to 97% of final value
Reliability:
100,000 Hours MTBF (testing ongoing)
Approvals/Certifications:
CE Approved
89/336/EEC (EN 55011 & EN 50082-1)
73/23/EEC Low Voltage Directive
Ratings:
IP64 (NEMA 4X)
Warranty:
1 year limited
0-10 VDC Output:
0 VDC at zero flow 
5 Kohm or greater output load
Not isolated
4-20 mA Output:
4 mA at zero flow 
500 ohm maximum current loop
Not isolated
0-5 VDC Output:
0 VDC at zero flow 
2.5 Kohm or greater output load
Not isolated
0-10 VDC Input:
0 VDC at zero flow  Input load is 100 Kohms Isolated from ground
0-5 VDC Input:
0 VDC at zero flow  Input load is 100 Kohms Isolated from ground
4-20 mA Input:
4 mA at zero flow  Input load is less than 50 ohms Isolated from ground
Error Output:
Activated when controller cannot achieve setpoint
Error condition=high (V+)
Normal condition=low
Automatically resets upon normal condition
Typical delay before activated: 8-10 seconds
Standby Mode:
Disables valve (freezes)
Automatically engaged when setpoint is <5% of full scale
Category
Description
File Size
File Name
MANUALS
Model U802 Instruction Manual
528.8 KB
APP NOTES
Point of Use Dilution
153.5 KB
APP NOTES
Particle Counter Flow Control
84.7 KB
TECH BULLETINS
UHP Components Prepared by Acid Leaching
319.9 KB
TECH BULLETINS
Model U801/U802 Pressure Requirement Explanation
128.1 KB
DATA SHEETS
U802 Data Sheet
2 MB
CATALOGS
UHP Product Short Form Catalog
1.5 MB
REPRINTS
Micro Magazine Article on CMP Slurry Dispense (Jan 2001)
139.5 KB
WARRANTIES
UHP Product Limited Warranty
67.3 KB