Model U802

SKU U802 Categories ,

McMillan U802 High Performance Flow Controllers will precisely measure and control flow of virtually any fluid, achieving rates as low as 13 mL/min or as high as 10 L/min. Wetted materials are limited to PTFE, FFKM, and sapphire.

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Description

McMillan U802 High Performance Flow Controllers will precisely measure and control flow of virtually any fluid, achieving rates as low as 13 mL/min or as high as 10 L/min. Repeatable results are attained by using a patented microturbine flow sensor design. This design, unlike traditional paddlewheel designs, provides accurate flow measurement with no particle generation. An integrated proportional control valve is utilized to regulate flow rate. PTFE, FFKM, and Sapphire wetted parts ensure compatibility with chemicals commonly found in microelectronics manufacturing processes, including deionized water, CMP slurries, acids, solvents, and photoresists.

Each unit is individually calibrated before shipment, and a certificate of calibration accompanies each flow controller. A repeatability specification of ± 0.2% full scale reassures process engineers of consistent results.

Features & Options

FLOW RANGES

Flow ranges from 13 – 100 mL/min up to 1.0 – 10.0 L/min are available. Consult the factory or authorized representative for custom requirements.

HIGH PERFORMANCE DESIGN

The U802 incorporates a heavy-duty stepper motor to provide fastest response and reliable performance across a large range of differential pressures.

POWER

Units operate with 24 VDC power.

SIGNAL CONFIGURATION

Units may be ordered with a 4-20 mA, 0-5 VDC, or 0-10 VDC configuration.

ACCURACY/LINEARITY

All models have an accuracy specification of ± 1.0% full scale (including linearity).

CALIBRATION

All units are calibrated at the factory using deionized water. Calibration curves may be requested for fluids with viscosities differing from water.

FLUID CONNECTIONS

All units have male flare compatible connections.

ELECTRICAL CONNECTIONS

All units have an integrated 7-pin connector. Several mating cable options are available.

WETTED MATERIALS

All units have only PTFE, FFKM, and sapphire as wetted parts.

Male flare fittings are standard.

Typical Differential Pressure (P20)

Typical Response Time

Specifications

Compatible Gases
Accuracy (including linearity)

± 1.0% full scale

Repeatability

± 0.20% full scale

Pressure Rating

100 psig [ 6.8 barg ] burst pressure
80 psig [ 5.4 barg ] max operational

Temperature Rating (Fluid)

32 to 131 °F [ 0 to 55 °C ]

Temperature Rating (Environmental)

Operating: 32 to 122 °F [ 0 to 50 °C ]
Storage: 32 to 158 °F [ 0 to 70 °C ]

Wetted Materials

PTFE
FFKM
Sapphire

Seal Material

FFKM

Recommended Filtration

20 microns or less

Compatible Fluids

Low viscosity (< 10 cSt)
Minimum amount of entrained air

Valve

PTFE cam-driven diaphragm
Not recommended for positive shutoff

0-5 VDC Output

0 VDC at zero flow
2.5 Kohm or greater output load
Not isolated

0-10 VDC Output

0 VDC at zero flow
5 Kohm or greater output load
Not isolated

4-20 mA Output

4 mA at zero flow
500 ohm maximum current loop
Not isolated

0-5 VDC Input

0 VDC at zero flow
Input load is 100 Kohms
Isolated from ground

0-10 VDC Input

0 VDC at zero flow
Input load is 100 Kohms
Isolated from ground

4-20 mA Input

4 mA at zero flow
Input load is less than 50 ohms
Isolated from ground

Standby Mode

Disables valve (freezes)
Automatically engaged when set point is < 5% of full scale

Error Output

Activated when controller cannot achieve setpoint
Error condition = high (V+) Normal condition = low
Automatically resets upon normal condition
Typical delay before activated: 8 - 10 seconds

Zero Drift

None

Warm-Up Time

None

Calibration Interval

Calibration should typically be verified once every 12 months

Power Requirements

22 - 25 VDC
250 mA typical (1 A peak)

Electrical Connections

7-pin connector

Response Time

Typically < 3 seconds for 97% of final value

Reliability

100,000 Hours MTBF

Certifications

CE Approved
89/336/EEC (EN 55011 & EN 50082-1)
73/23/EEC Low Voltage Directive
UKCA

Ratings

IP64 (NEMA 4X)

Downloads

CategoriesTitleSummaryFile SizeDownload
Data Sheets (PDF)U80X_DS-80X 2410 A.pdf

Latest data sheet for U80X Series Flow Controllers

2 MB

Related Products

The U706 is a PTFE liquid flow sensor featuring a straight flow path for inline fluid connections and an analog output. McMillan U70X Series Flow Sensors are capable of measuring extremely low flow rates of high-purity or corrosive media. Units are available that measure liquids as low as 13 mL/min and as high as 50 L/min.
McMillan U803 Compact Flow Controllers will precisely measure and control flow of virtually any fluid, achieving rates as low as 13 mL/min or as high as 1,000 mL/min. Wetted materials are limited to PTFE, FFKM, and sapphire.
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