Thermal mass flow controllers with analog I/O for precision flow measurement and control of inert gases. Flow rates as low as 0-20 sccm up to 10 L/minute.
McMillan RHODIUM Series Flow Controllers are capable of measuring and controlling virtually any clean, dry gas as low as 0-50 sccm or as high as 0-10 L/min. Repeatable results are achieved using a platinum-based micro-electromechanical system (MEMS) flow rate sensor device that is manufactured with extreme precision to ensure consistent results from unit to unit.
