Microturbine

Flow Technologies

Microturbine

McMillan’s microturbine wheel technology utilizes the Pelton turbine wheel concept. This design allows for the use of a miniature turbine wheel to measure flow. The wheel is supported by a very small sapphire shaft held in position by two maintenance-free bearings. Due to the light weight of both the wheel and the shaft, the microturbine wheel is virtually suspended in the flow path. This suspension effect relieves friction on the shaft and bearings, eliminating wear.

As flow passes through the device, it is directed onto the very small teeth of the wheel using a high precision nozzle (see the blue arrows below). This nozzle is sized according to the flow range of the unit. The rotational speed of the turbine wheel increases proportionally to the volumetric flow rate.

McMillan incorporates multiple versions of thermal sensing technology, including:

  • Microturbine with reflective turbine (for liquids and gases)
  • Microturbine with translucent windows (for liquids)
  • Flow control (for liquids)


D
etails for each variant of microturbine technology are outlined below. 

Microturbine Technology with Reflective Turbine

For Liquids and Gases

On some microturbine models, the Pelton wheel has alternating white and black sections evenly spaced on it’s surface. As the wheel rotates (as shown with green arrows), an infrared beam (as shown with red arrows) is reflected off each white section and directed to a phototransistor which detects each reflected beam and converts them into measured pulses. 

Increased flow causes the wheel to spin faster, increasing the pulse rate. When the wheel stops (under zero flow conditions), no pulses are generated. This eliminates the possibility of “zero drift” and the need for adjustments to the instrument’s zero reading. Processing circuitry provides analog and/or pulse outputs that are linearly proportional to the flow rate.

Microturbine Technology with Translucent Windows

For Liquids Only

On other models, the microturbine wheel has integrated translucent sections. An infrared emitter is located on one side of the wheel and a sensor on the other. As the wheel rotates (as shown with green arrows), the infrared beam (as shown in red) is alternately interrupted and passed through the translucent sections, detecting wheel speed, and generating a pulse based on flow. 

Increased flow causes the wheel to spin faster, increasing the pulse rate. When the wheel stops (under zero flow conditions), no pulses are generated. This eliminates the possibility of “zero drift” and the need for adjustments to the instrument’s zero reading. Processing circuitry provides analog and/or pulse outputs that are linearly proportional to the flow rate. 

Diaphragm Valve Flow Control Technology

For Liquids Only

Flow controllers use an integrated flow rate sensor and control valve to regulate flow rate, regardless of inlet pressure fluctuations. A flow control set-point is provided by the user via the touchscreen, or remotely via an electronic signal. The controller then adjusts the integrated valve as needed to maintain the desired flow. 

To provide responsive control of flow rate, the unit applies pressure to a large diaphragm that proportionally opens and closes the fluid pathway. This diaphragm is actuated by a precision engineered cam driven perpendicular to the diaphragm with the use of a stepper motor. As the stepper cam extends, it applies more pressure to the diaphragm. 

In addition to inputs provided by the flow sensor, flow controllers are also able to predictively estimate cam location based on set-point changes. This reduces response time to achieve large changes in flow rate based on large changes in the set-point. 

McMillan diaphragm valves are designed exclusively for proportional control. They are not designed for a positive shutoff. 

Microturbine-Based Products for Liquids and Gases

McMillan Model U709 will precisely measure very low flow rates of virtually any photoresist chemical, whether a short burst of flow or a continuous flow. Dispenses as short as 500 milliseconds and volumes as low as 0.1 grams can be detected repeatably.

The U708 is a compact PTFE liquid flow sensor featuring a straight flow path for inline fluid connections and an analog output. McMillan U70X Series Flow Sensors are capable of measuring extremely low flow rates of high-purity or corrosive media. Units are available that measure liquids as low as 13 mL/min and as high as 10 L/min.
The U707 is a compact PTFE liquid flow sensor featuring a straight flow path for inline fluid connections and a pulse output. McMillan U70X Series Flow Sensors are capable of measuring extremely low flow rates of high-purity or corrosive media. Units are available that measure liquids as low as 13 mL/min and as high as 10 L/min.
The U706 is a PTFE liquid flow sensor featuring a straight flow path for inline fluid connections and an analog output. McMillan U70X Series Flow Sensors are capable of measuring extremely low flow rates of high-purity or corrosive media. Units are available that measure liquids as low as 13 mL/min and as high as 50 L/min.
The U705 is a PTFE liquid flow sensor featuring a straight flow path for inline fluid connections and a pulse output. McMillan U70X Series Flow Sensors are capable of measuring extremely low flow rates of high-purity or corrosive media. Units are available that measure liquids as low as 13 mL/min and as high as 50 L/min.
McMillan U803 Compact Flow Controllers will precisely measure and control flow of virtually any fluid, achieving rates as low as 13 mL/min or as high as 1,000 mL/min. Wetted materials are limited to PTFE, FFKM, and sapphire.
McMillan S114 Flow Meters are constructed from stainless steel, rated for up to 500 psig (34.5 barg), and are capable of measuring extremely low liquid flow rates from 13 mL/min up to 10 L/min with a full scale accuracy of ± 1.0% or better.
McMillan S112 Flow Meters are constructed from brass, rated for up to 500 psig (34.5 barg), and are capable of measuring extremely low liquid flow rates from 13 mL/min up to 10 L/min with a full scale accuracy of ± 1.0% or better.
The U702 is a PTFE liquid flow sensor featuring a U-shaped flow path for compact fluid connections and an analog output. McMillan U70X Series Flow Sensors are capable of measuring extremely low flow rates of high-purity or corrosive media. Units are available that measure liquids as low as 13 mL/min and as high as 50 L/min.
McMillan S110 Flow Meters feature plastic construction and are capable of measuring extremely low flow rates. Units are available that measure gases as low as 20 mL/min and as high as 500 L/min. Full scale accuracies of ± 3.0% are standard.
McMillan 100 Flow Sensors are capable of measuring extremely low flow rates. Units are available that measure gases as low as 20 mL/min and as high as 500 L/min. Full scale accuracies of ± 3.0% or better are standard on Model 100 units. 
McMillan 106F Flow Sensors feature PTFE construction, male flare fittings, a U-shaped flow path, and work well in corrosive applications. Units are available that measure liquids as low as 13 mL/minute and as high as 50 L/minute. Full scale accuracies of ±1.0% or better are available on select models.
McMillan 106S Flow Sensors feature PTFE construction, integrated male flare fittings, an inline flow path, and work well in corrosive applications. Units are available that measure liquids as low as 13 mL/minute and as high as 50 L/minute. Full scale accuracies of ±1.0% or better are available on select models.
McMillan 107 Flow Sensors feature stainless steel construction and 4-20 mA outputs. Units are available that measure liquids as low as 13 mL/minute and as high as 10 L/minute. Full scale accuracies of ±1.0% or better are standard.
McMillan 104 Flow Sensors feature stainless steel construction and precision microturbine technology. Units are available that measure liquids as low as 13 mL/minute and as high as 10 L/minute. Full scale accuracies of ±1.0% or better are available.
McMillan 102 Flow Sensors feature brass construction and precision microturbine technology. Units are available that measure liquids as low as 13 mL/minute and as high as 10 L/minute. Full scale accuracies of ±1.0% or better are available.

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