McMillan U70X Series Flow Sensors are designed for corrosive and high-purity applications and are capable of measuring extremely low flow rates. Units are available that measure liquids as low as 7 mL/minute and as high as 50 L/minute. Full scale accuracies of ± 1.0% or better are available on analog output models.
McMillan Model U709 will precisely measure very low flow rates of virtually any photoresist chemical, whether a short burst of flow or a continuous flow. Dispenses as short as 500 milliseconds and volumes as low as 0.1 grams can be detected repeatably.
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