McMillan Model 108 PTFE Liquid FLO-SENSORS will precisely measure flow rates of virtually any fluid as low as 15 mL/minute or as high as 10 L/minute. Repeatable results are achieved by using a patented microturbine flow sensor design. This design, unlike traditional paddlewheel designs, provides accurate flow measurement with no particle generation. PTFE, perfluoroelastomers, and sapphire wetted parts ensure compatibility with chemicals commonly found in microelectronics manufacturing processes, including deionized water, CMP slurries, acids, solvents, and photoresist.
These PTFE Liquid FLO-SENSORS integrate the sensing element with advanced electronics to provide output signals proportional to flow rate. Each unit is individually calibrated before shipment, and a certificate of calibration accompanies all FLO-SENSORS. A repeatability specification of ±0.2% full scale reassures process engineers of consistent results.
Model 108 Features & Options
Pulse output models have an accuracy specification of ±3.0% full scale (including linearity).
Analog output models have an accuracy specification of ±1.0% full scale (including linearity).
All units are calibrated at the factory using deionized water. Calibration curves may be requested for fluids with viscosities differing from water.
McMillan has a comprehensive range of remote displays for use with UHP FLO-SENSORS. Please request further information from the factory.
All units have an integrated 7-pin connector. Several mating cable options are available.
Flow ranges from 15-100 mL/minute up to 1,000-10,000 mL/minute are available. Consult the factory for custom requirements.
All units have male Flaretek- compatible connections. Non-standard connection types may be available upon request.
GANGS OF MULTIPLE UNITS
To reduce overall footprint in multiple-channel applications, McMillan can assemble custom gangs of U707/U708 FLO-SENSORS and assign a custom part number for the entire assembly. Please request details from the factory.
Units may be specified to operate with either 12 VDC or 24 VDC power. Various power adapters are available for use with 12 VDC versions.
Pulse output configurations feature a pulse output, typically 0-400 Hz (consult calibration certificate for exact frequency output).
Analog output configurations are available with either a 4-20 mA, 0-5 VDC, or 0-10 VDC output.
All units have only PTFE, perfluoroelastomers, and sapphire as wetted parts.
- Accuracy (including linearity, best fit straight line):
- Pulse: ±3.0% Full Scale
Analog: ±1.0% Full Scale
- ±0.2% Full Scale
- Pressure Rating:
- 80 psig (5.4 bar) working
100 psig (6.8 bar) overpressure
- Temperature Rating (Fluid):
- Standard: 0 to 55ºC
HT suffix: 0 to 90ºC
- Temperature Rating (Environment):
- Operating: 0 to 50ºC
Storage: 0 to 70ºC
- Wetted Materials:
- Exterior Surfaces:
- O-Ring Material:
- Perfluoroelastomer (contact factory for current compound)
- Recommended Filtration:
- 20 microns or less
- Compatible Liquids:
- Low viscosity (<10 cS)
Translucent or transparent
Minimum amount of entrained air
- Warm-Up Time:
- Zero Drift:
- Electrical Connections:
- 7-pin connector
PTFE housing when used with CFx cables
Nylon housing when used with CPx cables
- Typical Response Time:
- Pulse: Typically <300 milliseconds for 97% of final value
Analog: Typically <1 second for 97% of final value
- 100,000 Hours MTBF (testing ongoing)
- CE Approved
89/336/EEC (EN 55011 & EN 50082-1)
73/23/EEC Low Voltage Directive
- IP64 (NEMA 4X)
- Pulse Output:
Pulls up to V+
- 0-10 VDC Output:
0 VDC at zero flow
5 Kohm or greater output load
- 4-20 mA Output:
4 mA at zero flow
500 ohm maximum current loop
- 0-5 VDC Output:
0 VDC at zero flow
2.5 Kohm or greater output load